Rigaku Launches High-Resolution CT Lab HR160 X-ray CT System
Rigaku Corporation, a global provider of X-ray analytical systems and a member of Rigaku Holdings Corporation, has announced the launch of the CT Lab HR160, a high-resolution X-ray computed tomography (CT) system designed for advanced analysis of batteries, semiconductor devices, electronic components, and other advanced materials.
Developed in collaboration with Excillum AB, a global developer of high-performance X-ray source technologies, the new system combines Rigaku’s expertise in X-ray CT imaging with Excillum’s NanoTube N3 X-ray source. The result is a laboratory CT platform designed to provide highly detailed, non-destructive three-dimensional imaging of internal structures and defects that can be difficult to identify using conventional laboratory CT systems.
A key feature of the CT Lab HR160 is its ability to achieve true 250 nm spatial resolution, an industry-leading level for CT systems in its class. This level of resolution is intended to help researchers, engineers, and manufacturers examine increasingly small and complex structures as electronic components and advanced materials continue to evolve.
High-Resolution Imaging for Advanced Applications
Modern batteries, semiconductor devices, electronic components, and advanced materials are becoming increasingly compact and sophisticated. At the same time, manufacturers are expected to deliver higher performance, greater reliability, and improved quality.
These developments have created a growing need for analytical technologies capable of examining internal structures without damaging or destroying the sample.
The Rigaku CT Lab HR160 addresses this challenge by providing high-resolution three-dimensional X-ray imaging in a laboratory environment. The system can reveal internal features, interfaces, voids, defects, and other structural characteristics that may not be readily accessible through conventional inspection techniques.
Because X-ray CT is non-destructive, researchers can examine the internal structure of a sample without cutting, disassembling, or otherwise altering it. This makes the technology particularly valuable during research and development, quality evaluation, materials characterization, and failure analysis.
The system is designed for applications involving solid-state batteries, semiconductor devices, multilayer ceramic capacitors (MLCCs), power electronics, and other advanced materials and components.
True 250 nm Spatial Resolution
The CT Lab HR160’s ability to achieve true 250 nm spatial resolution is one of its primary differentiators.
As components become smaller and manufacturing structures become more densely packed, subtle internal defects can have a significant effect on performance and reliability. Being able to visualize these features in three dimensions can give engineers a more comprehensive understanding of how materials and components are constructed and how they behave.
The Rigaku system combines high-resolution imaging with the NanoTube N3 X-ray source developed by Excillum. Operating at voltages of up to 160 kV, the CT Lab HR160 is designed to accommodate a broad range of sample types and analytical requirements.
The combination of high X-ray source performance and CT imaging capabilities enables users to examine fine internal structures while maintaining the flexibility needed for different materials and components.
Flexible Field of View and Resolution
Another important feature of the CT Lab HR160 is its cone-beam geometry, which allows users to adjust the field of view and imaging resolution without changing the X-ray source or detector.
This design is intended to simplify system operation while providing flexibility for different sample sizes and imaging requirements.
Users can select imaging conditions according to the characteristics of the sample and the level of detail required. This flexibility can be particularly valuable in research and development environments where multiple types of materials or components may need to be analyzed using the same laboratory system.
By eliminating the need to change major components when switching between imaging requirements, the system is designed to provide a more streamlined workflow and reduce operational complexity.
Supporting Battery and Semiconductor Development
The launch of the CT Lab HR160 comes as industries such as batteries and semiconductors continue to push the boundaries of miniaturization and performance.
In battery development, for example, researchers need to understand internal structures and interfaces to evaluate materials, identify defects, and investigate failure mechanisms. Solid-state batteries introduce additional complexity because of their layered structures and advanced materials.
High-resolution CT imaging can provide valuable three-dimensional information without requiring destructive sample preparation, supporting research teams as they evaluate new materials and manufacturing processes.
Semiconductor and electronic component manufacturers face similar challenges. As devices become smaller and more complex, microscopic defects or variations inside components can affect performance and reliability.
The CT Lab HR160 is designed to provide researchers and engineers with a tool for examining these internal features and gaining greater insight into manufacturing quality and potential failure mechanisms.
Applications also extend to MLCCs and power electronics, where internal structures can be highly complex and increasingly difficult to inspect using traditional laboratory methods.
Accelerating Research and Failure Analysis
Beyond product development, high-resolution X-ray CT can play an important role in failure analysis.
When a component fails, engineers need to determine what happened and identify the underlying cause. Traditional analysis methods can require cutting or dismantling the sample, potentially destroying evidence about how different internal structures interacted.
Non-destructive CT imaging provides an alternative by allowing engineers to visualize internal structures before additional destructive analysis is performed.
The detailed three-dimensional information generated by the CT Lab HR160 can help researchers investigate defects, manufacturing irregularities, material behavior, and other potential causes of failure.
“CT Lab HR160 gives customers a new option for addressing increasingly complex analytical challenges in advanced materials and electronic devices,” said Kiyoshi Ogata, General Manager of the Product Division at Rigaku. “By providing high-resolution CT capabilities in a laboratory environment, we aim to support faster decision-making across research, development, quality evaluation, and failure analysis.”
Collaboration with Excillum
The CT Lab HR160 reflects the combined capabilities of Rigaku and Excillum, bringing together expertise in X-ray imaging and advanced X-ray source technology.
Excillum’s NanoTube N3 source is integrated into the system to support the high-resolution imaging capabilities required for detailed analysis of modern materials and components.
“We are pleased to see Excillum’s X-ray source technology integrated into Rigaku’s new CT Lab HR160 system,” said Sara Haack, Chief Commercial Officer at Excillum AB. “This collaboration brings together the strengths of both companies and creates new opportunities to support R&D and manufacturing at the forefront of advanced industries.”
The partnership highlights the growing importance of high-performance X-ray sources and advanced imaging technologies as manufacturers work with increasingly complex materials and structures.
Advancing Industrial and Research Analysis
The CT Lab HR160 expands the capabilities available to laboratories and industrial organizations that require detailed internal analysis without compromising sample integrity.
By combining high spatial resolution, flexible imaging conditions, and non-destructive three-dimensional visualization, the system is designed to support a wide range of analytical workflows.
For researchers, it can provide deeper insight into materials and structures during development. For manufacturers, it can support quality evaluation and process improvement. For engineering teams, it can provide valuable information during failure investigations and product reliability studies.
The system also reflects Rigaku’s broader commitment to developing analytical technologies that support innovation across high-tech industries.
About Rigaku
Founded in 1951, the Rigaku Group develops analytical and industrial solutions built around technologies including X-ray and thermal analysis.
The company operates across 136 countries and regions, with approximately 2,000 employees across nine global operations. Rigaku serves customers in industries and research organizations spanning semiconductors, electronic materials, batteries, environmental applications, resources, energy, life sciences, and other advanced technology fields.
With approximately 70% of sales generated outside Japan, Rigaku combines a strong domestic presence with an expanding global footprint.
The company’s mission is centered on using analytical technology to provide new perspectives and support innovation across industries.
About Excillum
Excillum is a global developer of advanced X-ray source technologies. Founded in 2007 and headquartered in Stockholm, Sweden, the company develops, manufactures, and supports high-performance industrial and laboratory X-ray sources.
Excillum works with scientific, industrial, and system integration partners to develop technologies that support new research, manufacturing improvements, and other advanced applications.
Through the integration of Excillum’s X-ray source technology with Rigaku’s CT imaging expertise, the CT Lab HR160 is positioned to address the growing demand for high-resolution, non-destructive analysis of next-generation materials and electronic components.
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